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Vacuum deposition apparatus

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Vacuum deposition apparatus comprises vacuum chamber with opening; substrate; evacuating means; movable unit relative to opening with cover and support; reactor mounted on support; and positioning means in chamber.

Vacuum Deposition Control by Detection of Pressure Decrease

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Vacuum Deposition Evaporator Cell

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Vacuum Deposition for EMI/RFI Shielding

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Discursive article with photos constrasting main types of vacuum technol. for this appl'n.

Vacuum Deposition of a Conductive Layer onto a Semiconductor

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Vacuum Deposition of Dielectric Coatings on Volatile Material.

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In order to allow application of any coating under a vacuum over a volatile gelatinous layer, such as polymer dispersed liquid crystal (PDLC) on an optical glass substrate with a transparent electrode, such as indium tin oxide (ITO) on its surface, a layer of an intermediate stress absorbing polymeric material is first applied to cover the volatile gelatinous layer to prevent evaporation and escape of volatiles, thereafter the coating is applied under a very high vacuum using for example Physical Vapor Deposition (PVD) or sputtering.

Vacuum Deposition of Metallic Coatings on Steel

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A discourse on vacuum dep'n by evap'n and use of electron beams. Designs are shown for these. The continuous plating of steel strip is described, with comments on Sn,Zn,Cr,Al,Ni,Cu and alloys as coating mat'ls. 6 refs.

Vacuum Deposition of Optical Multilayer Coating on Glass with Multiple Chambers

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Vacuum deposition process and apparatus

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Vacuum deposition processes

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A complete overview with numerous diagrams, emphasising the continuous development of equipment and covering PVD, vacuum evaporation (resistively and electron beam heated); focused e-beam, sputter source configurations (balanced & unbalanced magnetrons), advantages & drawbacks of vacuum & sputter coating, arc vapour deposition, ion plating (plasma & vacuum based), plasma enhanced CVD (PECVD); hybrid vacuum processes and equipment for the foregoing. An RF-driven parallel plate CVD reactor is shown. Comments & comparative merits on all the foregoing.

Vacuum Deposition Processes & Properties of Thin Films

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Discussion of thin films for optical coatings, microstructure of evaporated thin films and how to improve properties. SEM's show surface roughness & structure of titanium oxide films & 2D computer ballistic simulation of thin film growth is shown. 44 refs

Vacuum Deposition System

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Vacuum Deposition Techniques

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Part I of survey series covers vacuum evaporation & cathodic sputtering. Sketches & photos of plant, graphs of beam current vs. dep'n rates for 4 metals, plot of dep'n rate vs. RF power. Use of argon gas in these processes.

Vacuum Deposition Techniques

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Pt II considers chemical vapour dep'n, ion plating, magnetron sputtering with disc'n of pumping, air-locks and other design features, target constr'n, plasma assisted CVD, magnetron sputtering, columnar structure of deposits.

Vacuum Deposition Techniques - Methods of Aluminium Evaporation

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Review with photos and sketches covers resistance heating, radiant heated vaporisation sources, induction methods of evap'n; ion plating, sputtering. 4 refs.