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Vacuum Carburizing Method and Device.

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Vacuum Carburizing Method and Device.

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Carburising at sub-atmospheric pressures using hydrocarbon gases, process monitored in terms of opacity of incoming & exiting gases (optical absorption).

Vacuum chamber

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Vacuum chamber for film deposition.

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Chamber consists of cylindrical shell with bases, for arranging equipment with access hole, closed, through elastomer seals, with cover, in form of part of cylindrical panel, of internal radius greater than external radius of cylindrical shell by 72% of thickness of elastomer seals. In order to improve sealing, elastomer seal is mounted directly on cylindrical shell, panel carries stiffening ribs, one of which is parallel to shell axis,and passes through centre of contour, restricted by projection of elastomer seal, while two remaining ribs are located on its ends.

Vacuum chuck for coating apparatus

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Vacuum coated composite body

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Substrate of sintered material with layers outermost of which is of alumina applied at max. 800°C, entirely crystalline and consisting of alpha- and optionally beta-alumina with (440) texture, compressive stress of at least 1 GPa and hardness min. 20 GPa. Coating is produced by reactive magnetron sputtering using pulsed magnetron at frequency of 20-100KHz and sputtering rate of min. 1 nm/s.

Vacuum coated composite body

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Metal or alloy substrate with layers outermost of which is of alumina applied at max. 700°C, entirely crystalline and consisting of alpha-alumina and optionally beat-form, with (440) texture, compressive stress of at least 1 GPa and hardness min. 20 GPa. Coating is produced by magnetron sputtering using pulsed magnetron at frequency of 20-100KHz and sputtering rate of min. 1 nm/s.

Vacuum coated composite body

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Substrate of sintered material with layers outermost of which is of alumina applied at max. 800°C, entirely crystalline and consisting of alpha or optionally beta alumina with (440) texture, compressive stress of ca. 1 GPa and hardness ca. 20 GPa. Coating is produced by reactive magnetron sputtering using pulsed magnetron at frequency of 20-100KHz and sputtering rate of min. 1 nm/s.

Vacuum coated composite body

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Metal or alloy substrate with layers outermost of which is of alumina applied at max. 700°C, entirely crystalline and consisting of alpha or beta alumina with (440) texture, compressive stress of ca. 1 GPa and hardness approx. 20 GPa. Coating is produced by magnetron sputtering using pulsed magnetron at frequency of 20-100KHz and sputtering rate of ca. 1 nm/s.

Vacuum Coater

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Vacuum Coater

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Vacuum Coater Valve

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Vacuum Coater with Door

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Vacuum Coater with Multiple Chambers & Transfer

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Vacuum Coater with Rotary Motion

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