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Vacuum Coater with Rotating Cover & Pass Through Heating Means

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(also see US 4226587)

Vacuum Coater with Turntable

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Vacuum Coating

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General overview with colour photos showing the diverse applications of vacuum coating processes incl. spectacles & other high-value items, as well as coatings on window glass and continuous coating of plastic films. Graph shows how aluminium deposit thickness reduces oxygen permeation through a PET foil. 10 refs.

Vacuum Coating

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Vacuum Coating

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Comments on vacuum deposition incl. use of super imposed bias voltage. Histogram shows effect of this on increasing adhesion of tin films, graphs show surface roughness for PVD titanium nitride vs. bias voltage & effect of bias voltage on substrate temperature. Disc'n of ion bombardment, ion energy & applications of the above ideas to industrial PVD processes.

Vacuum coating - Cryopumps, sorption pumps and cryopanels

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Vacuum coating apparatus

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Vacuum coating apparatus

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Vacuum coating apparatus for coating substrate entirely by rotation in stream of material.

Vacuum coating apparatus

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Vacuum coating apparatus

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Vacuum coating apparatus comprises transfer chamber, several peripheral treatment chambers with single opening and with handling device with substrate holder and swingable or rotatable holder for transport of substrates between treatment chambers.

Vacuum coating apparatus

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Vacuum coating apparatus

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Vacuum coating apparatus comprising plasma guide surrounded by magnetic deflecting system communicating with plasma source and adjoining main chamber with substrate holder; plasma source being surrounded by electromagnets.

Vacuum coating apparatus

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Vacuum coating apparatus comprising tank with opening placed against substrate; seal for opening; coating source comprising target-bearing sputtering target in tank; shut-off wall movable between coating source and opening.

Vacuum coating apparatus

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Apparatus comprises evacuable coating chamber with 2 cathodes and substrate; AC source; network transmitting power network having frequencies different from that of AC source; cathodes co-operating with targets so that particles are deposited on substrate; process gas and cathode power resulting in cathode resistance R(cat) between cathodes; and during deposition cathodes having maximum power level at which power level corresponding resistance is R(max). Network has impedance opposing change of cathode power away from working point power level.

Vacuum coating apparatus

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